High precision MEMS accelerometer
Performance | Units | HT-MC-01 | HT-MC-02 | HT-MC-03 |
Input range | g | 4 | 30-50 | 70-100 |
Bandwidth(adjustable) | Hz | 200 | 200 | 200 |
Bias Stability 10s smooth 1 sigma | ug | 10 | 100 | 200 |
Bias Repeatability(1 month) | ug | 200 | 500 | 1000 |
Bias Temp Sensitivity | ug/℃ | 300 | 500 | 1000 |
Scale Factor nonlinearity | Ppm | <1000 | 2000 | <2000 |
Scale Factor Repeatability(1 month) | Ppm | <200 | <300 | <300 |
Scale Factor Temp Sensitivity | ppm/℃ | 20 | 30 | 50 |
Second-order nonlinearity | ug/g2 | 250 | 100 | 100 |
Resolution | ug | 0.5 | 4 | 8 |
Start time | s | <1 | <1 | <1 |
Sampling frequency | Hz | 2000 | 2000 | 2000 |
Shock | g | 10000 | 10000 | 10000 |
Vibration Rectification (6grms) | mg/grms | <5 | <1 | <1 |
Work Temp | ℃ | -45-85 | -45-85 | -45-85 |
Voltage | V | 5±0.25 | 5±0.25 | 5±0.25 |
Current | ma | 15 | 15 | 15 |
Size | mm | 11.00*11.00*2.50 |
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High precision MEMS accelerometer.pdf
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