High precision MEMS accelerometer


Performance

Units

HT-MC-01

HT-MC-02

HT-MC-03

Input range

g

4

30-50

70-100

Bandwidthadjustable

Hz

200

200

200

Bias Stability 10s smooth 1 sigma

ug

10

100

200

Bias Repeatability(1 month)

ug

200

500

1000

Bias Temp Sensitivity

ug/

300

500

1000

Scale Factor nonlinearity

Ppm

<1000

2000

<2000

Scale Factor Repeatability(1 month)

Ppm

<200

<300

<300

Scale Factor Temp Sensitivity

ppm/

20

30

50

Second-order nonlinearity

ug/g2

250

100

100

Resolution

ug

0.5

4

8

Start time

s

<1

<1

<1

Sampling frequency

Hz

2000

2000

2000

Shock

g

10000

10000

10000

Vibration Rectification (6grms)

mg/grms

<5

<1

<1

Work Temp

-45-85

-45-85

-45-85

Voltage

V

5±0.25

5±0.25

5±0.25

Current

ma

15

15

15

Size

mm

11.00*11.00*2.50


High precision MEMS accelerometer.png



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